Silicon-Based Metal-Semiconductor-Metal Detectors
- 1 April 1998
- journal article
- Published by Springer Nature in MRS Bulletin
- Vol. 23 (4) , 55-59
- https://doi.org/10.1557/s088376940003027x
Abstract
Photodetectors must provide fast and efficient conversion of photons to charge carriers. When considering semiconductor light sources, the indirect bandgap of silicon and germanium represents a serious obstacle to radiative electron-hole recombinations. Momentum conservation demands the simultaneous interaction of the electron-hole pair with a momentum-matching phonon. As a consequence, radiative recombinations are five orders of magnitude less probable in Si if compared to a direct semiconductor such as GaAs. Although the absorption of a photon and the generation of an electron-hole pair may be considered as the inverse process to emission, photon absorption within indirect semiconductors is a highly probable process if the photon energy is sufficient to bridge the energy gap in a direct process. The resulting electronhole pair is created in an excited state and relaxes sequentially. The ubiquitous-silicon solar cells operate this way. In the visible spectral range, Si photodetectors have demonstrated fast and efficient performance, being readily adapted for opto electronic applications and being fully compatible to standard-silicon processing schemes.Keywords
This publication has 22 references indexed in Scilit:
- Fabrication and performance characteristics of high-speed ion-implanted Si metal–semiconductor–metal photodetectorsApplied Optics, 1997
- Vertical MSM photodiodes in silicon based on epitaxial Si/CoSi2/SiThin Solid Films, 1997
- Increase in the infrared response of silicide Schottky barrier diodes by grain boundary scatteringApplied Physics Letters, 1995
- 1 Gb/s Si high quantum efficiency monolithically integrable λ=0.88 μm detectorApplied Physics Letters, 1995
- 140-GHz metal-semiconductor-metal photodetectors on silicon-on-insulator substrate with a scaled active layerApplied Physics Letters, 1994
- Si/SiGe heterostructures and devicesThin Solid Films, 1993
- A 75 GHz silicon metal-semiconductor-metal Schottky photodiodeApplied Physics Letters, 1993
- Fundamentals of PhotonicsPhysics Today, 1992
- Ion beam synthesis of epitaxial silicides: fabrication, characterization and applicationsMaterials Science Reports, 1992
- Probing Semiconductors with Femtosecond PulsesPhysics Today, 1990