Deposition and characterization of TiAlZrN films produced by a combined steered arc and unbalanced magnetron sputtering technique
- 1 September 1995
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 74-75, 123-134
- https://doi.org/10.1016/0257-8972(95)08298-0
Abstract
No abstract availableKeywords
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