Re-configurable fluid circuits by PDMS elastomer micromachining
- 1 January 1999
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- No. 10846999,p. 222-227
- https://doi.org/10.1109/memsys.1999.746817
Abstract
We report on a microfabrication technique for realizing re-configurable micro fluidics devices using polymethylsiloxane material (PDMS). The mechanical characteristics of the material, including the Young's modulus and the adhesion energy have been determined experimentally. The magnitude of Young's modulus ranges from 8.7/spl times/10/sup 5/ Pa to 3.6/spl times/10/sup 5/ Pa. The adhesion energy is a function of the PDMS composition as well as chemical treatment. A method for efficiently developing flow interconnects has been demonstrated.Keywords
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