Miniaturized infrared sensor using silicon diaphragm based on Golay cell
- 1 April 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 66 (1-3) , 29-32
- https://doi.org/10.1016/s0924-4247(97)01702-0
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Micromachined infrared sensors using tunneling displacement transducersReview of Scientific Instruments, 1996
- An infrared pneumatic detector made by micromachining technologyJournal of Micromechanics and Microengineering, 1995