Laser evaporation of metal sandwich layers for improved IC metallization
- 1 December 1990
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 46 (1) , 163-167
- https://doi.org/10.1016/0169-4332(90)90137-o
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Mechanism of picosecond ultraviolet laser sputtering of sapphire at 266 nmApplied Physics Letters, 1990
- Effects of beam parameters on excimer laser deposition of YBa2Cu3O7−δApplied Physics Letters, 1990
- Preparation of Y-Ba-Cu oxide superconductor thin films using pulsed laser evaporation from high T c bulk materialApplied Physics Letters, 1987
- Plasma luminescence generated in laser evaporation of dielectricsJournal of Vacuum Science & Technology A, 1987