Preparation of silicon carbide powders by chemical vapour deposition of the (CH3)2SiCl2-H2 system
- 1 November 1990
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science
- Vol. 25 (11) , 4614-4621
- https://doi.org/10.1007/bf01129915
Abstract
No abstract availableKeywords
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