High cooling power density SiGe/Si micro-coolers
- 18 January 2001
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 37 (2) , 126-127
- https://doi.org/10.1049/el:20010096
Abstract
SiGe/Si superlattice micro-coolers are investigated experimentally. They can be monolithically integrated with Si-based microelectronic devices to achieve localised cooling and temperature control. Cooling by as much as 4.2 K at 25°C and 12 K at 200°C was measured on 3 µm thick, 60 × 60 µm2 devices. This corresponds to maximum cooling power densities approaching kW/cm2.Keywords
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