Long microwave discharge in the diffusion regime sustained in a waveguide
- 1 February 1984
- journal article
- Published by Springer Nature in Czechoslovak Journal of Physics
- Vol. 34 (2) , 105-114
- https://doi.org/10.1007/bf01590054
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Conditions of existence and axial structure of long microwave discharges sustained by travelling wavesJournal of Physics D: Applied Physics, 1983
- Differences between microwave and RF activation of nitrogen for the PECVD processJournal of Physics D: Applied Physics, 1982
- Properties and applications of surface wave produced plasmasRevue de Physique Appliquée, 1982
- Present status of thin oxide films creation in a microwave plasmaCzechoslovak Journal of Physics, 1980