Detectors for low voltage scanning electron microscopy
- 1 January 1991
- Vol. 13 (4) , 275-287
- https://doi.org/10.1002/sca.4950130403
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- Low-profile high-efficiency microchannel-plate detector system for scanning electron microscopy applicationsReview of Scientific Instruments, 1990
- Specimen biasing to enhance or suppress secondary electron emission from charging specimens at low accelerating voltages,Scanning, 1989
- Control of charging in low‐voltage SEMScanning, 1989
- The relationship between accelerating voltage and electron detection modes to linewidth measurement in an SEMScanning, 1988
- Design and Application of a Quadrupole Detector for Low‐Voltage Scanning Electron MicroscopyScanning, 1986
- Microchannel plate detector for low voltage scanning electron microscopesJournal of Microscopy, 1985
- Low voltage scanning electron microscopyJournal of Microscopy, 1984
- A single crystal of YALO3: Ce3+ as a fast scintillator in SEMScanning, 1983
- Detector system for backscattered electrons by conversion to secondary electronsScanning, 1979
- Wide-band detector for micro-microampere low-energy electron currentsJournal of Scientific Instruments, 1960