Single-chip condenser microphone using porous silicon as sacrificial layer for the air gap
- 1 January 2001
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 87 (3) , 188-193
- https://doi.org/10.1016/s0924-4247(00)00483-0
Abstract
No abstract availableKeywords
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