Spatiotemporal electron dynamics in radio-frequency glow discharges: fluid versus dynamic Monte Carlo simulations
- 14 April 1995
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 28 (4) , 727-737
- https://doi.org/10.1088/0022-3727/28/4/016
Abstract
No abstract availableKeywords
This publication has 34 references indexed in Scilit:
- Self-consistent fluid modeling of radio frequency discharges in two dimensionsApplied Physics Letters, 1993
- Fluid simulations of glow discharges: Effect of metastable atoms in argonJournal of Applied Physics, 1993
- Hydrodynamic analysis of electron motion in the cathode fall using a Monte Carlo simulationJournal of Applied Physics, 1992
- Self-consistent Monte Carlo simulation of the cathode fall including treatment of negative-glow electronsPhysical Review A, 1992
- Self-consistent Monte Carlo modelling of RF plasma in a helium-like model gasJournal of Physics D: Applied Physics, 1992
- Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCCIEEE Transactions on Plasma Science, 1991
- Glow-discharge sheath electric fields: Negative-ion, power, and frequency effectsPhysical Review A, 1987
- A Continuum Model of DC and RF DischargesIEEE Transactions on Plasma Science, 1986
- Monte Carlo Simulation of Electron Swarms in H2Australian Journal of Physics, 1977
- Energy Distribution of Electrons in High Frequency Gas DischargesPhysical Review B, 1946