Substrate options and add-on process modules for monolithic RF silicon technology

This publication has 18 references indexed in Scilit:

• Substrate effects in monolithic RF transformers on silicon
  IEEE Transactions on Microwave Theory and Techniques, 2002
• Current status and future trends of SiGe BiCMOS technology
  IEEE Transactions on Electron Devices, 2001
• IC-compatible two-level bulk micromachining process module for RF silicon technology
  IEEE Transactions on Electron Devices, 2001
• Isolation on Si wafers by MeV proton bombardment for RF integrated circuits
  IEEE Transactions on Electron Devices, 2001
• Substrate crosstalk suppression capability of silicon-on-insulator substrates with buried ground planes (GPSOI)
  IEEE Microwave and Guided Wave Letters, 2000
• CMOS on FZ-high resistivity substrate for monolithic integration of SiGe-RF-circuitry and readout electronics
  IEEE Transactions on Electron Devices, 1997
• Spiral inductors and transmission lines in silicon technology using copper-damascene interconnects and low-loss substrates
  IEEE Transactions on Microwave Theory and Techniques, 1997
• Design Considerations for Monolithic Microwave Circuits
  IEEE Transactions on Microwave Theory and Techniques, 1981
• Monolithic broadband GaAs f.e.t. amplifiers
  Electronics Letters, 1976
• Microstrip Transmission On Semiconductor Dielectrics
  IEEE Transactions on Microwave Theory and Techniques, 1965