Preparation of macroscopic two-dimensional ordered array of indium nanodots
- 1 January 2000
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 18 (1) , 10-12
- https://doi.org/10.1116/1.591141
Abstract
A macroscopic two-dimensional highly ordered array of indium nanodots was achieved using a very simple method of vacuum evaporation on anodic aluminum. The ordered indium nanodots, seated on small, shallow holes of an Al template, are arranged in a rhombic pattern with a typical period of about 100 nm. The formation mechanism of the indium nanodots is discussed.Keywords
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