Characterization of piezoelectric properties of zinc oxide thin films deposited on silicon for sensors applications
- 31 May 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 33 (1-2) , 43-45
- https://doi.org/10.1016/0924-4247(92)80223-p
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Plate-Mode Ultrasonic Oscillator SensorsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1987
- Integrated multisensor chipIEEE Electron Device Letters, 1986