Crystaline effects in single crystal and highly textured TiNxfilms
- 1 July 1988
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 12 (2) , 131-136
- https://doi.org/10.1002/sia.740120213
Abstract
The results of a study of AES spectra obtained from single crystal and highly textured fine grained TiNx films are presented. The existence of specimen crystallinity effects is demonstrated particularly in the single crystal samples. These can be large enough to affect quantitative analysis. Unexpected changes in the spectra were also found on changing the incident angle of the ion beam.Keywords
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