Effects of Platinum Electrode Structures on Crystallinity and Electrical Properties of Mod-Prepared Pzt Capacitors
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Processing Effects in the Sol–Gel Preparation of PZT Dried Gels, Powders, and Ferroelectric Thin LayersJournal of the American Ceramic Society, 1992
- In situ deposition of epitaxial PbZrxTi(1−x)O3 thin films by pulsed laser depositionApplied Physics Letters, 1991
- Preparation and electrical properties of MOCVD-deposited PZT thin filmsJournal of Applied Physics, 1991
- Excimer laser ablated lead zirconate titanate thin filmsJournal of Applied Physics, 1991
- Compositional and microstructural characterization of thin film lead zirconate titanate ferroelectricsThin Solid Films, 1990
- Characterization of Pb(Zr,Ti)O3 thin films deposited from multielement metal targetsJournal of Applied Physics, 1988