GaAs substrate pretreatment and metalorganic vapour phase epitaxy of GaAs, AlAs and (AlGa) As using β-eliminating trialkyl-As precursors
- 2 December 1994
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 145 (1-4) , 512-519
- https://doi.org/10.1016/0022-0248(94)91100-2
Abstract
No abstract availableKeywords
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