Focused laser lithographic system
- 1 April 1978
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 17 (7) , 1069-1071
- https://doi.org/10.1364/ao.17.001069
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 5 references indexed in Scilit:
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- Horn structures for integrated opticsOptics Communications, 1977
- Optical waveguide parabolic coupling hornsApplied Physics Letters, 1977
- Electro-optically switched coupler with stepped Δβ reversal using Ti-diffused LiNbO3 waveguidesApplied Physics Letters, 1976
- Fabrication techniques for surface-acoustic-wave and thin-film optical devicesProceedings of the IEEE, 1974