The effects of deposition parameters on iron films RF diode sputtered in argon-nitrogen
- 1 January 1990
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Magnetics
- Vol. 26 (5) , 1456-1458
- https://doi.org/10.1109/20.104409
Abstract
No abstract availableKeywords
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- Synthesis of iron-nitride films by means of ion beam depositionIEEE Transactions on Magnetics, 1984