Self-ion sputtering yields for copper, nickel, and aluminum
- 15 March 1982
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 194 (1-3) , 615-619
- https://doi.org/10.1016/0029-554x(82)90592-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Sputtering observations during binary alloy production by ion implantationNuclear Instruments and Methods, 1981
- Study of the sputtering process with Rutherford backscatteringNuclear Instruments and Methods, 1976
- Sputtering experiments in the high energy regionNuclear Instruments and Methods, 1961