X-ray photoelectron spectroscopy studies of the surface of ion-beam reactive sputter deposited zirconia films

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1 January 1992

journal article
Published by Springer Nature in Journal of Materials Science Letters

Vol. 11 (10) , 681-683
https://doi.org/10.1007/bf00728905

Abstract

No abstract available

Keywords

This publication has 5 references indexed in Scilit:

An XPS study of the interaction of oxygen with zirconium
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Characterization of r.f.-sputtered zirconia coatings
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Monte Carlo calculation for structural modifications in ion-assisted thin film deposition due to thermal spikes
Journal of Vacuum Science & Technology A, 1986
Ion-based methods for optical thin film deposition
Journal of Materials Science, 1986
XPS investigation of the effects induced by the silanization on real glass surfaces
Journal of Non-Crystalline Solids, 1984