Theory of Charge Transfer in Amorphous-Silicon Charge-Coupled Devices

Abstract
Charge transfer in amorphous-silicon charge-coupled devices is analyzed, taking the density distribution of residual electrons perpendicular to the insulator/amorphous-silicon interface into account. The high transfer inefficiency obtained experimentally is explained by this thickness effect. When the amorphous-silicon layer is as thin as 10 nm, the transfer inefficiency is predicated to approach 10-4 at clock frequencies of more than 10 kHz.

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