Optical emission diagnostics of an rf magnetron sputtering discharge
- 1 July 1993
- journal article
- Published by Elsevier in Spectrochimica Acta Part B: Atomic Spectroscopy
- Vol. 48 (8) , 1023-1033
- https://doi.org/10.1016/s0584-8547(05)80007-2
Abstract
No abstract availableKeywords
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