Infrared optical properties of silicon oxynitride films: Experimental data and theoretical interpretation
- 15 September 1986
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 60 (6) , 2081-2091
- https://doi.org/10.1063/1.337212
Abstract
Films of SiOxNy, with 0.25≲x≲2 and 0<y≲1.52, were prepared by reactive rf‐magnetron sputtering. The composition was determined by Rutherford backscattering spectrometry. Spectrophotometric measurements were conducted in the 2.5–50 μm range, and the complex dielectric function ε was extracted by computation. We interpreted ε by considering the vibrational properties of five basic Si‐centered tetrahedra, whose relative occurrence was given by the stoichiometry, and using the Bruggeman effective medium theory to average over the different tetrahedra. Theoretical and experimental data on ε were found to agree very well.This publication has 46 references indexed in Scilit:
- Surface coatings for radiative cooling applications: Silicon dioxide and silicon nitride made by reactive rf-sputteringSolar Energy Materials, 1985
- Determination of optical constants from photometric measurementsSolar Energy Materials, 1984
- Materials for radiative cooling to low temperatureSolar Energy Materials, 1984
- Reactively sputtered silicon oxy-nitride films for solar absorber anti-reflection coatingsSolar Energy Materials, 1984
- Silicon oxynitride; a material for GRIN opticsApplied Optics, 1982
- Radiative cooling to low temperatures: General considerations and application to selectively emitting SiO filmsJournal of Applied Physics, 1981
- Determination of optical constants of absorbing materials using transmission and reflection of thin films on partially metallized substrates: analysis of the new (T,Rm) techniqueApplied Optics, 1981
- Analysis of evaporated silicon oxide films by means of (d, p) nuclear reactions and infrared spectrophotometryPhysica Status Solidi (a), 1971
- Characterization of Silicon Nitride FilmsJournal of the Electrochemical Society, 1971
- Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzen. I. Dielektrizitätskonstanten und Leitfähigkeiten der Mischkörper aus isotropen SubstanzenAnnalen der Physik, 1935