A combined plasma-surface model for the deposition of C:H films from a methane plasma
- 15 June 1994
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 75 (12) , 7718-7727
- https://doi.org/10.1063/1.356603
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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