CVD of copper using copper(I) and copper(II) β-diketonates
- 1 June 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 262 (1-2) , 60-66
- https://doi.org/10.1016/0040-6090(95)05840-0
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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