Liquid metal ion sources for FIB microfabrication systems — recent advances
- 1 January 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 6 (1-2) , 135-142
- https://doi.org/10.1016/0168-583x(85)90624-x
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
- A liquid metal source of caesium ions for secondary ion mass spectrometryVacuum, 1984
- Secondary ion imaging in the scanning ion microscopeNuclear Instruments and Methods in Physics Research, 1983
- Focused Ion Beams in Microelectronic FabricationIEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1983
- Lateral Spreads of Be and Si in GaAs Implanted with a Maskless Ion Implantation SystemJapanese Journal of Applied Physics, 1983
- Some comments on the mechanism of emission from liquid metal ion sourcesJournal of Physics D: Applied Physics, 1982
- A 100-kV ion probe microfabrication system with a tetrode gunJournal of Vacuum Science and Technology, 1981
- Characteristics of a gallium liquid metal field emission ion sourceJournal of Physics D: Applied Physics, 1980
- High-resolution, ion-beam processes for microstructure fabricationJournal of Vacuum Science and Technology, 1979
- Miniature ion sources for analytical instrumentsNuclear Instruments and Methods, 1978
- Evaluation of a cesium primary ion source on an ion microprobe mass spectrometerAnalytical Chemistry, 1977