Integrated sensors: interfacing electronics to a non-electronic world

This publication has 11 references indexed in Scilit:

• A batch-fabricated silicon thermopile infrared detector
  IEEE Transactions on Electron Devices, 1982
• Integrated silicon microbeam PI-FET accelerometer
  IEEE Transactions on Electron Devices, 1982
• Micromechanical accelerometer integrated with MOS detection circuitry
  IEEE Transactions on Electron Devices, 1982
• Solid state: Silicon sensors meet integrated circuits: The combination of sensing and circuit technology in monolithic form is making transducers cheaper and more versatile
  IEEE Spectrum, 1981
• An electrochemical P-N junction etch-stop for the formation of silicon microstructures
  IEEE Electron Device Letters, 1981
• MOS area sensor: Part I—Design consideration and performance of an n-p-n structure 484 × 384 element color MOS imager
  IEEE Transactions on Electron Devices, 1980
• A monolithic capacitive pressure sensor with pulse-period output
  IEEE Transactions on Electron Devices, 1980
• A batch-fabricated silicon accelerometer
  IEEE Transactions on Electron Devices, 1979
• Integrated signal conditioning for silicon pressure sensors
  IEEE Transactions on Electron Devices, 1979
• A Water-Amine-Complexing Agent System for Etching Silicon
  Journal of the Electrochemical Society, 1967