Fabrication and Characterization of Multilayer Zone Plate for Hard X-Rays
- 1 November 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (11A) , L2131
- https://doi.org/10.1143/jjap.27.l2131
Abstract
A zone plate for 8 keV X-rays with alternative WSi2 and C layers was fabricated using a DC planer magnetron sputtering. The zone plate had 20 pairs of a high aspect ratio for hard X-rays. Its thickness was about 50 µm. An X-ray interference pattern through the zone plate was observed using monochromated synchrotron X-rays, and a focusing property of the zone plate was confirmed. The focal length was about 67 mm and the spot size (FWHM) was smaller than 8 µm.Keywords
This publication has 5 references indexed in Scilit:
- Transmission gratings that diffract 8 keV x raysApplied Physics Letters, 1987
- Optical Systems for Soft X RaysPublished by Springer Nature ,1986
- Soft x-ray microscopesReview of Scientific Instruments, 1985
- Status Of The Sputtered Sliced Zone Plates For X-Ray MicroscopyPublished by SPIE-Intl Soc Optical Eng ,1982
- Diffraction Characteristics of a Linear Zone Plate*Journal of the Optical Society of America, 1966