A Comparison of Three Techniques for Depositing DLC Films at Temperatures Between 25 and 100°C

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Abstract
Diamond-Like Carbon (DLC) films have been deposited on silicon, glass and plastic surfaces by three different techniques: (a) Pulsed Laser Ablative Deposition, (b) Remote Microwave or DC Plasma Deposition, and (c) Moving Acetylene Flame Deposition. All three techniques were found to be capable of depositing hard films on these surfaces without raising the substrate temperatures above 100°C. The films produced were analyzed by X-ray, electron, Raman, IR, and visible spectroscopy, for hardness and adhesion, and by SEM for surface morphology. An extensive search for the optimum conditions for the formation of hard, adhering and transparent films has shown that it is essential that during the deposition process the surface is bombarded by high energy positive ions. The optimum conditions were found to be most easily achieved with a glow discharge.