New diagnostic aspects of high rate a-Si:H deposition in a VHF plasma
- 1 May 1996
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 198-200, 1038-1041
- https://doi.org/10.1016/0022-3093(96)00035-x
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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