Wide Optical-Gap a-Si:O:H Films Prepared from SiH4–CO2 Gas Mixture
- 1 January 1986
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 25 (1A) , L39
- https://doi.org/10.1143/jjap.25.l39
Abstract
Hydrogenated amorphous silicon oxygen alloy films (a-Si:O:H) with wide optical-gap have been prepared by rf glow discharge decomposition of CO2 and SiH4 gas mixture. The optical-gap increases monotonically from 1.76 eV to 2.43 eV with increasing molar fraction of CO2 to SiH4 in the gas phase. A high photoconductivity of 4.1×10-9(Ω·cm)-1 is obtained for the films with the optical-gap of 2.43 eV. Efficient doping is possible in these films and these properties suggest that the films are useful as window materials of photodetectors.Keywords
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