Development of ionized cluster beam source for practical use
- 1 January 1990
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 61 (1) , 604-606
- https://doi.org/10.1063/1.1141931
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Ionized cluster beam depositionJournal of Vacuum Science & Technology B, 1988
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- Applications of ionized cluster beam to anti-reflection coating of transmission windowsVacuum, 1986
- A low-energy, ultrahigh vacuum, solid-metal ion source for accelerated-ion doping during molecular beam epitaxyJournal of Vacuum Science & Technology B, 1984