Contact and alignment marker technology for atomic scale device fabrication

This publication has 7 references indexed in Scilit:

• Individual single-wall carbon nanotubes as quantum wires
  Nature, 1997
• STM analysis of wet-chemically prepared H-Si(001) surface
  Applied Surface Science, 1996
• Surface roughening and metastable superstructures on wet-processed Si(111) surface induced by hydrogen desorption
  Surface Science, 1996
• Ideal hydrogen termination of Si(001) surface by wet-chemical preparation
  Applied Physics Letters, 1995
• Mesoscopic silicon coupled superconducting junctions of CoSi2 formed in a self-aligned process
  Microelectronic Engineering, 1994
• Morphological instability and Si diffusion in nanoscale cobalt silicide films formed on heavily phosphorus doped polycrystalline silicon
  Applied Physics Letters, 1993
• Anisotropic etching versus interaction of atomic steps: Scanning tunneling microscopy observations on HF/NH4F-treated Si(111)
  Journal of Applied Physics, 1993