Reactive sputtering of simple condensed gases by kev ions III: Kinetic energy distributions
- 1 December 1984
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 5 (3) , 483-488
- https://doi.org/10.1016/0168-583x(84)90005-3
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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