Origin and Control of Material Defects in Silicon VLSI Technologies: An Overview
- 1 April 1982
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Solid-State Circuits
- Vol. 17 (2) , 105-116
- https://doi.org/10.1109/jssc.1982.1051701
Abstract
No abstract availableKeywords
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