Megaelectronvolt phosphorus implantation for bipolar devices
- 1 October 1988
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 35 (10) , 1616-1619
- https://doi.org/10.1109/16.7362
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- 1-3 MeV B+and P+Implants for C-Mos TechnologyMRS Proceedings, 1985