Surface micromachined ring test structures to determine mechanical properties of compressive thin films
- 17 July 2001
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 92 (1-3) , 292-298
- https://doi.org/10.1016/s0924-4247(01)00586-6
Abstract
No abstract availableKeywords
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