Evidence of hydrogen modulation in Si/Si:H amorphous multilayers

A low-angle neutron-scattering study of amorphous multilayered silicon evaporated under a modulated pressure of hydrogen is presented. We showed it is possible to obtain different periodic structures of type Si/SiH/Si/SiD or SiH/SiD/SiH/SiD. The use of mixtures M=${\mathrm{H}}_{1\mathrm{-}\mathrm{x}}$ ${\mathrm{D}}_{\mathrm{x}}$ in type Si/SiM/Si/SiM samples allows us to vary the contrast between the pure silicon layer and the less dense ‘‘hydrogenated’’ silicon layer and to link the loss of density of silicon and the hydrogen content.