Preparation of High-Conductivity p-Type a-Si:H Films by Penning Discharge
- 1 December 1981
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 20 (12) , 2431-2432
- https://doi.org/10.1143/jjap.20.2431
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Low-temperature crystallization of doped a-Si:H alloysApplied Physics Letters, 1980
- Novel effects of magnetic field on the silane glow dischargeApplied Physics Letters, 1980
- Doped amorphous semiconductorsAdvances in Physics, 1977