Residual defect control when doping thin layers in diamond

This publication has 14 references indexed in Scilit:

• Ion implantation and diamond: some recent results on growth and doping
  Thin Solid Films, 1992
• Issues in diamond device fabrication
  Diamond and Related Materials, 1992
• Ion-implanted structures and doped layers in diamond
  Materials Science Reports, 1992
• Materials modification: doping of diamond by ion implantation
  Materials Science and Engineering: B, 1992
• Point-defect interactions when annealing diamonds implanted at low temperatures
  Physical Review B, 1991
• The redistribution of implanted atoms and radiation damage during the implantation doping of diamond
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
• Doping of diamond by coimplantation of carbon and boron
  Applied Physics Letters, 1989
• Fermi-Dirac statistics and the nature of the compensating donors in boron-doped diamond layers
  Physical Review B, 1989
• Activation of boron-dopant atoms in ion-implanted diamonds
  Physical Review B, 1988
• Electrical-Transport Measurements on Synthetic Semiconducting Diamond
  Physical Review B, 1966