Issues in diamond device fabrication
- 15 April 1992
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 1 (5-6) , 688-691
- https://doi.org/10.1016/0925-9635(92)90192-q
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- An ion-implanted diamond metal-insulator-semiconductor field-effect transistorIEEE Electron Device Letters, 1991
- High-temperature thin-film diamond field-effect transistor fabricated using a selective growth methodIEEE Electron Device Letters, 1991
- A thermally activated solid state reaction process for fabricating ohmic contacts to semiconducting diamondJournal of Applied Physics, 1990
- Activation of boron-dopant atoms in ion-implanted diamondsPhysical Review B, 1988