New field emission gun with energy filtering effect
- 1 July 1989
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 66 (1) , 1-4
- https://doi.org/10.1063/1.343905
Abstract
We have developed and tested a new kind of field emission gun. This electron gun is an energy filtering field emission gun that is able to reduce the energy spread of the beam. An energy spread as small as ΔE=0.16 eV full width at half maximum has been measured, at an accelerating voltage V=10 kV, for a probe current Ip=2.1 nA and an illuminating half-angle α=1.2 mrad.This publication has 1 reference indexed in Scilit:
- Pulsed field emission electron or ion gun with energy filterMicroelectronic Engineering, 1987