Annealing of Defects in Ion-Implanted Layers by Pulsed Laser Radiation

Publisher Website

1 January 1977

book chapter
Published by Springer Nature

p. 445-451
https://doi.org/10.1007/978-1-4613-4196-3_47

Abstract

No abstract available

Keywords

This publication has 3 references indexed in Scilit:

Hall effect and sheet resistivity measurements on ion-bombarded InSb
Physica Status Solidi (a), 1975
n-p JUNCTION PHOTODETECTORS IN InSb FABRICATED BY PROTON BOMBARDMENT
Applied Physics Letters, 1970
Neutron Irradiation of Indium Antimonide
Physical Review B, 1954