A capacitance based ultra-precision spindle error analyser
- 1 July 1985
- journal article
- Published by Elsevier in Precision Engineering
- Vol. 7 (3) , 129-137
- https://doi.org/10.1016/0141-6359(85)90032-7
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The effect of tilt and surface damage on practical capacitance displacement transducers (interferometric technique)Journal of Physics E: Scientific Instruments, 1978
- Some theoretical aspects of error separation techniques in surface metrologyJournal of Physics E: Scientific Instruments, 1976
- The design and some applications of sensitive capacitance micrometersJournal of Physics E: Scientific Instruments, 1973