Automatic jet thinning of GaAs for transmission electron microscopy
- 1 March 1968
- journal article
- research article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 1 (3) , 301-302
- https://doi.org/10.1088/0022-3735/1/3/307
Abstract
Jet thinning equipment is described which incorporates a photomultiplier system to stop the etching when the specimen is thin enough to be electron transparent. A micromanipulator mounting made it possible to thin preselected areas. The equipment produced large areas of uniform and reproducible thickness with a one hundred per cent success rate.This publication has 2 references indexed in Scilit:
- Thinning crystals of semiconducting compounds for transmission electron microscopyJournal of Scientific Instruments, 1966
- Preparation of GaAs Specimens for Transmission Electron MicroscopyJournal of the Electrochemical Society, 1966