Control of batch processing systems in semiconductor wafer fabrication facilities
- 1 January 1992
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Semiconductor Manufacturing
- Vol. 5 (4) , 319-328
- https://doi.org/10.1109/66.175364
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Preliminary design and development of a corporate level production planning system for the semiconductor industryPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Real-time control of multiproduct bulk-service semiconductor manufacturing processesIEEE Transactions on Semiconductor Manufacturing, 1992
- Dynamic batching heuristic for simultaneous processingIEEE Transactions on Semiconductor Manufacturing, 1991
- Closed-loop job release control for VLSI circuit manufacturingIEEE Transactions on Semiconductor Manufacturing, 1988
- The Bulk Service Queue with a General Control Strategy: Theoretical Analysis and a New Computational ProcedureOperations Research, 1986
- Optimal control of batch service queuesAdvances in Applied Probability, 1973