Innovative Surface Wave Plasma Reactor Technique for PFC Abatement
- 27 January 1998
- journal article
- research article
- Published by American Chemical Society (ACS) in Environmental Science & Technology
- Vol. 32 (5) , 682-687
- https://doi.org/10.1021/es9706514
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Infrared Study of Process Emissions during C 3 F 8 / O 2 Plasma Cleaning of Plasma Enhanced Chemical Vapor Deposition ChambersJournal of the Electrochemical Society, 1997
- Detoxification of Trichloroethylene in a Low-Pressure Surface Wave Plasma ReactorEnvironmental Science & Technology, 1996
- Tropospheric trends for CF4 and C2F6 since 1982 derived from SF6 dated stratospheric airGeophysical Research Letters, 1996
- Acetone Conversion in a Low-Pressure Oxygen Surface Wave PlasmaEnvironmental Science & Technology, 1995
- Surface Wave Plasmas in O2-N2 Mixtures as Active Species Sources for Surface TreatmentsPublished by Springer Nature ,1993
- Reaction of chlorocarbons to hydrochloric acid and hydrocarbons in a hydrogen-rich microwave induced plasma reactorEnvironmental Science & Technology, 1989
- Hazardous Air Emissions from IncinerationPublished by Springer Nature ,1985
- Kinetics of the Oxidation of Carbon Monoxide and the Decomposition of Carbon Dioxide in a Radiofrequency Electric Discharge. I. Experimental ResultsIndustrial & Engineering Chemistry Fundamentals, 1974