Reentrant cavity as a low-power plasma source
- 1 December 1986
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 57 (12) , 2957-2960
- https://doi.org/10.1063/1.1139023
Abstract
A low-power source of plasma employing ECRH microwave breakdown in a reentrant cavity is described. The cavity has the following features: its dimensions can be made much smaller than its resonant wavelength, cavity Q values of several hundred are not difficult to achieve, and the vacuum rf electric field is uniform near its center. The plasma density to power ratio is roughly 109 cm−3 per watt for powers up to about 10 W. A smooth radial profile and a temperature of 5–10 eV are observed, and the plasma is very quiescent (δn/n is less than 1%). The cavity’s construction and performance is described and compared to the performance of a simple loop antenna in a nonresonant structure.Keywords
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