Scanning differential optical profilometer for simultaneous measurement of amplitude and phase variation
- 4 July 1988
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 53 (1) , 10-12
- https://doi.org/10.1063/1.100118
Abstract
A scanning optical profilometer is described which can simultaneously and independently measure the differential phase/amplitude variation of light reflected off an object surface. This information may then be interpreted as topographical and reflectivity variation of the object surface. The system is based on a heterodyne interferometer and uses two beams to probe the surface. The theoretical sensitivity of the system is 3×10−3 mrad in phase and 3 in 105 in reflectivity variation, both measured in a 1 kHz bandwidth. Preliminary measurements of film thickness and reflectivity variation are presented. This system also has potential applications for imaging objects with minute structural variations.Keywords
This publication has 5 references indexed in Scilit:
- Linear imaging in scanning polarisation/interference contrast microscopyElectronics Letters, 1986
- Differential amplitude imaging in scanning optical microscopeElectronics Letters, 1986
- Scanning differential phase contrast optical microscope: application to surface studiesApplied Optics, 1985
- Optical heterodyne profilometryApplied Optics, 1981
- Linear Phase MicroscopyApplied Optics, 1973